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Extra info for Advances in Electronic and Electrochemical Ceramics, Volume 179
M have been obtained. Increased DC power during deposition decreases the breakdown strength due to increased metal incorporation or voids in the sputtered films. Energy densities of up to 15 J/cc have been obtained on AlON films. REFERENCES *M. Rabuffi and G. Picci. "Status quo and future prospects for metallized polypropolene energy storage capacitors," IEEE Trans. , 30, 1939-42 (2002). M. J. J. I. Pankove, M. L. Gilbert. "Expitaxial grown A1N and its optical band gap," J. Appl. , 44, 292-6 (1973).
Gas pressures ranged from 3 mTorr to 20 mTorr. Deposition conditions strongly influence the crystallinity of the films12, but optical and secondary electron microscopy observation confirmed our films were amorphous under all deposition conditions examined. The target-to-substrate spacing was adjusted to influence substrate heating and film uniformity with an optimal distance of 5 inches used for the majority of the runs. The target was conditioned for 15 - 30 minutes before each run using argon plasma to remove contamination from the surface.
Consequently, it would be expected that a structure of the size of the proposed VDP would demonstrate minimal dispersion, even though the materials do demonstrate hysteretic damping. 1 The large net dispersion anticipated from the VDP heterostructure results from the large impedance mismatch at the interfaces between layers. This effectively forces the traveling wave to traverse the BST and SMA layers, where energy dispersion takes place, numerous times, creating an effective thickness many hundreds of times larger than the physical thickness.